The Bears announced the moves on Thursday.
Williams appeared in 12 games and recorded 73 tackles in his second season with the Bears. A 10-year veteran with an expiring contract, he joined cornerback Charles Tillman and linebacker Lance Briggs as the third opening-day defensive starter at least 32 years old to go on IR.
Owens, a two-time Pro Bowl pick on special teams, has 74 special teams tackles over nine seasons with Jacksonville (2006-12) and Detroit (2013-14). He also has 56 carries for 292 yards and three touchdowns to go with 12 receptions for 132 yards in his career.
AP NFL website: www.pro32.ap.org and www.twitter.com/AP-NFL