Will Cummings scored 16 points, and had seven rebounds and five assists for the Owls (3-2). Quenton DeCosey added 14 points and Josh Brown 11.
Tony Hicks scored 17 points for the Quakers (0-4) before fouling out with 6:30 left. Matt Howard scored 15 and Darien Nelson-Henry 12, along with grabbing eight rebounds.
Penn held a 37-29 advantage on the boards but had 19 turnovers.
Temple led 44-37 at halftime and went up 11 early in the second half on a 3-pointer by Williams. Penn closed to within a point at 61-60 and was down only 70-67 with 1:15 remaining before the Owls hit their free throws down the stretch.